Monday, 27 May 2019

Humidity Sensing Application

Hiran Jothilal, S. Angappane

TiO2 slanted nanorods deposited by EB evaporation with Glancing angle is the working material for Humidity sensing. Before deposition, Gap electrodes were made on the substrate (glass). Gap electrodes were made on glass using suitable masks and 50-micron fibre followed by sputtering of Ti-Au (Ti- 30nm and Au-60nm). Then TiO2 nanorods were deposited by EB evaporation at a glancing angle of 80˚ by evaporating TiO2 pellets which were made from commercially available TiO2 powder.

Humidity Sensing Application

TiO2 slanted nanorods deposited on glass substrate with gap electrodes.

Humidity sensing of TiO2 slanted nanorods grown on glass substrate with gap electrodes was tested before and after annealing. Sensing results shows a good improvement on annealed sample compared to as prepared sample.

Humidity sensing response

Humidity sensing response of (a) as prepared TiO2 slanted nanorods on Glass to 71% RH and (b) annealed TiO2 slanted nanorods on Glass to 85% RH.