Sunday, 15 September 2019

Projection Lithography (Lab Engineering, INDIA):

Projection lithography

Technical and Characterization Specifications:
  • 1X, 20X and 50X optical objects
  • Precision X/Y stage having Mitutoyo digital readout on X/Y axis having ±2µm. accuracy and a least count of 1 µm.
  • Stroke on X/Y axis 25mm
  • Stage size 100mm x 100mm
  • Stage movement on precision hardened and cross roller guides
  • M plan Apo1X ultra long working distance objective
  • Variable aperture and ND filters in optical path