Sunday, 15 September 2019

Field Emission Scanning Electron Microscope

Field emmission Scanning Electron Microscope

Technical and Characterization Specifications:
  • 2X to10,00,000X Magnification
  • High vacuum and low vacuum ( up to 500 Pa) imaging
  • IR camera for chamber view
  • Everhart-Thornley type detectors with YAG scintillators
  • Chamber SE detector, Resolution-1.2 nm at 30 kV (SE: Secondary electrons)
  • In-Beam SE detector,Resolution-1.0 nm at 30 kV
  • In-Beam backscattered SE detector , Resolution-2.0 nm at 15 kV
  • Low vacuum SE detector with differentially pumped detection chamber and a dedicated turbo molecular pump , Resolution-3.0 nm at 30 kV
  • Beam deceleration mode (BDM) with in-Beam annular SE detector for thin films, semiconductors and also for specimens prone to radiation damages, Resolution-1.8 nm at 1kV
  • Air cooled column
  • Pneumatic anti-vibration suspension system
  • Accelerating voltage- 50 V to 30 kV in steps of 10 V
  • Probe current 2 pA to 200 nA
  • Probe current detector
  • Field of view- 6.4 mm at WD 10 mm and 20 mm at WD 30 mm
  • 20 ns to 10 ms per pixel scanning speed (Adjustable continuously)
  • Selectable image frame size up to 8192 X 8192 pixels
  • Point & line scan, image rotation & shift and tilt compensation
  • Sample stage movements :
    • Motorized X,Y,Z = 80 mm, 60 mm, 47 mm respectively
    • Rotation = 360 deg –motorized
    • Tilt = -80o to +80o -motorized
  • Compucentric stage
  • Multiple specimen holder
  • Fixed Scanning transmission electron microscope (STEM) Detector –
  • Sample prepared using standard TEM grids for sample insertion
  • Resolution in high vacuum- 0.8 nm at 30 kV
  • Bright field and dark field imaging